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Novel Air Flow Meter for an Automobile Engine Using a Si Sensor with Porous Si Thermal Isolation
An air flow meter for measuring the intake air of an automobile engine is presented. It is based on a miniaturized silicon thermal mass flow sensor using a thick porous Si (Po-Si) layer for local thermal isolation from the Si substrate, on which the sensor active elements are integrated. The sensor...
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| Main Authors: | , , |
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| Formato: | Artigo |
| Idioma: | Inglês |
| Publicado em: |
Molecular Diversity Preservation International (MDPI)
2012
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| Assuntos: | |
| Acesso em linha: | https://ncbi.nlm.nih.gov/pmc/articles/PMC3522942/ https://ncbi.nlm.nih.gov/pubmed/23202189 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.3390/s121114838 |
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