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Atomic force microscope based biomolecular force-clamp measurements using a micromachined electrostatic actuator
The authors describe a method for biomolecular force clamp measurements using atomic force microscope (AFM) cantilevers and micromachined membrane-based electrostatic actuators. The actuators comprise of Parylene membranes with embedded side actuation electrodes and are fabricated on a silicon subst...
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| Main Authors: | , , |
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| Format: | Artigo |
| Language: | Inglês |
| Published: |
2012
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| Subjects: | |
| Online Access: | https://ncbi.nlm.nih.gov/pmc/articles/PMC3515702/ https://ncbi.nlm.nih.gov/pubmed/22960003 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.1016/j.ultramic.2012.07.023 |
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