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Micromachined Accelerometers With Optical Interferometric Read-Out and Integrated Electrostatic Actuation
A micromachined accelerometer device structure with diffraction-based optical detection and integrated electrostatic actuation is introduced. The sensor consists of a bulk silicon proof mass electrode that moves vertically with respect to a rigid diffraction grating backplate electrode to provide in...
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| Hlavní autoři: | , , , , , , , , |
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| Médium: | Artigo |
| Jazyk: | Inglês |
| Vydáno: |
2008
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| Témata: | |
| On-line přístup: | https://ncbi.nlm.nih.gov/pmc/articles/PMC2601649/ https://ncbi.nlm.nih.gov/pubmed/19079635 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.1109/JMEMS.2007.910243 |
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