Učitavanje...
Simulation of Thin-Film Damping and Thermal Mechanical Noise Spectra for Advanced Micromachined Microphone Structures
In many micromachined sensors the thin (2–10 μm thick) air film between a compliant diaphragm and backplate electrode plays a dominant role in shaping both the dynamic and thermal noise characteristics of the device. Silicon microphone structures used in grating-based optical-interference microphone...
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| Glavni autori: | , , , , |
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| Format: | Artigo |
| Jezik: | Inglês |
| Izdano: |
2008
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| Teme: | |
| Online pristup: | https://ncbi.nlm.nih.gov/pmc/articles/PMC2600454/ https://ncbi.nlm.nih.gov/pubmed/19081811 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.1109/JMEMS.2008.918384 |
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