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Electroless etching of Si with IO(3)(–) and related species
We have previously derived seven requirements for the formulation of effective stain etchants and have demonstrated that Fe(3+), Ce(4+), and VO(2)(+) + HF solutions are highly effective at producing nanocrystalline porous silicon. Here, we show that Cl(2), Br(2), I(2), ClO(3)(–), BrO(3)(–), IO(3)(–)...
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| Main Authors: | , |
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| Formato: | Artigo |
| Idioma: | Inglês |
| Publicado em: |
Springer
2012
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| Assuntos: | |
| Acesso em linha: | https://ncbi.nlm.nih.gov/pmc/articles/PMC3503702/ https://ncbi.nlm.nih.gov/pubmed/22716927 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.1186/1556-276X-7-323 |
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