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Catalytic activity of noble metals for metal-assisted chemical etching of silicon
Metal-assisted chemical etching of silicon is an electroless method that can produce porous silicon by immersing metal-modified silicon in a hydrofluoric acid solution without electrical bias. We have been studying the metal-assisted hydrofluoric acid etching of silicon using dissolved oxygen as an...
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| Autors principals: | , , , |
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| Format: | Artigo |
| Idioma: | Inglês |
| Publicat: |
Springer
2012
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| Matèries: | |
| Accés en línia: | https://ncbi.nlm.nih.gov/pmc/articles/PMC3499284/ https://ncbi.nlm.nih.gov/pubmed/22738277 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.1186/1556-276X-7-352 |
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