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Fabrication of 200 nanometer period centimeter area hard x-ray absorption gratings by multilayer deposition

We describe the design and fabrication trials of x-ray absorption gratings of 200 nm period and up to 100:1 depth-to-period ratios for full-field hard x-ray imaging applications. Hard x-ray phase-contrast imaging relies on gratings of ultra-small periods and sufficient depth to achieve high sensitiv...

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Bibliografiske detaljer
Main Authors: Lynch, S K, Liu, C, Morgan, N Y, Xiao, X, Gomella, A A, Mazilu, D, Bennett, E E, Assoufid, L, de Carlo, F, Wen, H
Format: Artigo
Sprog:Inglês
Udgivet: 2012
Fag:
Online adgang:https://ncbi.nlm.nih.gov/pmc/articles/PMC3468157/
https://ncbi.nlm.nih.gov/pubmed/23066175
https://ncbi.nlm.nih.govhttp://dx.doi.org/10.1088/0960-1317/22/10/105007
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