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Fabrication of 200 nanometer period centimeter area hard x-ray absorption gratings by multilayer deposition
We describe the design and fabrication trials of x-ray absorption gratings of 200 nm period and up to 100:1 depth-to-period ratios for full-field hard x-ray imaging applications. Hard x-ray phase-contrast imaging relies on gratings of ultra-small periods and sufficient depth to achieve high sensitiv...
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| Autores principales: | , , , , , , , , , |
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| Formato: | Artigo |
| Lenguaje: | Inglês |
| Publicado: |
2012
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| Materias: | |
| Acceso en línea: | https://ncbi.nlm.nih.gov/pmc/articles/PMC3468157/ https://ncbi.nlm.nih.gov/pubmed/23066175 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.1088/0960-1317/22/10/105007 |
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