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Focused electron beam induced deposition: A perspective
Background: Focused electron beam induced deposition (FEBID) is a direct-writing technique with nanometer resolution, which has received strongly increasing attention within the last decade. In FEBID a precursor previously adsorbed on a substrate surface is dissociated in the focus of an electron be...
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| Main Authors: | , , , , , , , |
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| Formato: | Artigo |
| Idioma: | Inglês |
| Publicado em: |
Beilstein-Institut
2012
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| Assuntos: | |
| Acesso em linha: | https://ncbi.nlm.nih.gov/pmc/articles/PMC3458607/ https://ncbi.nlm.nih.gov/pubmed/23019557 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.3762/bjnano.3.70 |
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