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An Annular Mechanical Temperature Compensation Structure for Gas-Sealed Capacitive Pressure Sensor
A novel gas-sealed capacitive pressure sensor with a temperature compensation structure is reported. The pressure sensor is sealed by Au-Au diffusion bonding under a nitrogen ambient with a pressure of 100 kPa and integrated with a platinum resistor-based temperature sensor for human activity monito...
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| 主要な著者: | , , , , |
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| フォーマット: | Artigo |
| 言語: | Inglês |
| 出版事項: |
Molecular Diversity Preservation International (MDPI)
2012
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| 主題: | |
| オンライン･アクセス: | https://ncbi.nlm.nih.gov/pmc/articles/PMC3436014/ https://ncbi.nlm.nih.gov/pubmed/22969385 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.3390/s120608026 |
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