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Relation between electrical properties of aerosol-deposited BaTiO(3) thin films and their mechanical hardness measured by nano-indentation
To achieve a high capacitance density for embedded decoupling capacitor applications, the aerosol deposition (AD) process was applied as a thin film deposition process. BaTiO(3) films were fabricated on Cu substrates by the AD process at room temperature, and the film thickness was reduced to confir...
में बचाया:
| मुख्य लेखकों: | , , , , , |
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| स्वरूप: | Artigo |
| भाषा: | Inglês |
| प्रकाशित: |
Springer
2012
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| विषय: | |
| ऑनलाइन पहुंच: | https://ncbi.nlm.nih.gov/pmc/articles/PMC3422166/ https://ncbi.nlm.nih.gov/pubmed/22616759 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.1186/1556-276X-7-264 |
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