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Growth behavior of titanium dioxide thin films at different precursor temperatures
The hydrophilic TiO(2 )films were successfully deposited on slide glass substrates using titanium tetraisopropoxide as a single precursor without carriers or bubbling gases by a metal-organic chemical vapor deposition method. The TiO(2 )films were employed by scanning electron microscopy, Fourier tr...
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| Main Authors: | , , |
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| Formato: | Artigo |
| Idioma: | Inglês |
| Publicado em: |
Springer
2012
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| Assuntos: | |
| Acesso em linha: | https://ncbi.nlm.nih.gov/pmc/articles/PMC3296554/ https://ncbi.nlm.nih.gov/pubmed/22280933 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.1186/1556-276X-7-89 |
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