SiO(x)/SiN(y )multilayers for photovoltaic and photonic applications

Microstructural, electrical, and optical properties of undoped and Nd(3+)-doped SiO(x)/SiN(y )multilayers fabricated by reactive radio frequency magnetron co-sputtering have been investigated with regard to thermal treatment. This letter demonstrates the advantages of using SiN(y )as the alternating...

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Bibliographic Details
Main Authors: Nalini, Ramesh Pratibha, Khomenkova, Larysa, Debieu, Olivier, Cardin, Julien, Dufour, Christian, Carrada, Marzia, Gourbilleau, Fabrice
Format: Artigo
Language:Inglês
Published: Springer 2012
Subjects:
Nano Express
Online Access:https://ncbi.nlm.nih.gov/pmc/articles/PMC3293743/
https://ncbi.nlm.nih.gov/pubmed/22333343
https://ncbi.nlm.nih.govhttp://dx.doi.org/10.1186/1556-276X-7-124
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