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SiO(x)/SiN(y )multilayers for photovoltaic and photonic applications
Microstructural, electrical, and optical properties of undoped and Nd(3+)-doped SiO(x)/SiN(y )multilayers fabricated by reactive radio frequency magnetron co-sputtering have been investigated with regard to thermal treatment. This letter demonstrates the advantages of using SiN(y )as the alternating...
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| Main Authors: | , , , , , , |
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| Formato: | Artigo |
| Idioma: | Inglês |
| Publicado em: |
Springer
2012
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| Assuntos: | |
| Acesso em linha: | https://ncbi.nlm.nih.gov/pmc/articles/PMC3293743/ https://ncbi.nlm.nih.gov/pubmed/22333343 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.1186/1556-276X-7-124 |
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