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Design and Analyses of a MEMS Based Resonant Magnetometer
A novel design of a MEMS torsional resonant magnetometer based on Lorentz force is presented and fabricated. The magnetometer consists of a silicon resonator, torsional beam, excitation coil, capacitance plates and glass substrate. Working in a resonant condition, the sensor’s vibration amplitude is...
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| Hauptverfasser: | , , , , , |
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| Format: | Artigo |
| Sprache: | Inglês |
| Veröffentlicht: |
Molecular Diversity Preservation International (MDPI)
2009
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| Schlagworte: | |
| Online Zugang: | https://ncbi.nlm.nih.gov/pmc/articles/PMC3290475/ https://ncbi.nlm.nih.gov/pubmed/22399981 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.3390/s90906951 |
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