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A Miniature Resonant and Torsional Magnetometer Based on Lorentz Force
A microelectromechanical system (MEMS) torsional resonant magnetometer based on Lorentz force was investigated, consisting of torsional structures, torsional beams, metal plates, a coil, and a glass substrate. The Lorentz force, introduced by the interaction between the current in the MEMS coil and...
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| Veröffentlicht in: | Micromachines (Basel) |
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| Hauptverfasser: | , , , |
| Format: | Artigo |
| Sprache: | Inglês |
| Veröffentlicht: |
MDPI
2018
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| Schlagworte: | |
| Online Zugang: | https://ncbi.nlm.nih.gov/pmc/articles/PMC6316825/ https://ncbi.nlm.nih.gov/pubmed/30562964 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.3390/mi9120666 |
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