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A study on the characteristics of plasma polymer thin film with controlled nitrogen flow rate

Nitrogen-doped thiophene plasma polymer [N-ThioPP] thin films were deposited by radio frequency (13.56 MHz) plasma-enhanced chemical vapor deposition method. Thiophene was used as organic precursor (carbon source) with hydrogen gas as the precursor bubbler gas. Additionally, nitrogen gas [N(2)] was...

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Detalhes bibliográficos
Main Authors: Cho, Sang-Jin, Boo, Jin-Hyo
Formato: Artigo
Idioma:Inglês
Publicado em: Springer 2012
Assuntos:
Acesso em linha:https://ncbi.nlm.nih.gov/pmc/articles/PMC3285046/
https://ncbi.nlm.nih.gov/pubmed/22221905
https://ncbi.nlm.nih.govhttp://dx.doi.org/10.1186/1556-276X-7-62
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