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Effects of process parameters on sheet resistance uniformity of fluorine-doped tin oxide thin films
An alternative indium-free material for transparent conducting oxides of fluorine-doped tin oxide [FTO] thin films deposited on polyethylene terephthalate [PET] was prepared by electron cyclotron resonance - metal organic chemical vapor deposition [ECR-MOCVD]. One of the essential issues regarding m...
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| Main Authors: | , , |
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| Formato: | Artigo |
| Idioma: | Inglês |
| Publicado em: |
Springer
2012
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| Assuntos: | |
| Acesso em linha: | https://ncbi.nlm.nih.gov/pmc/articles/PMC3275492/ https://ncbi.nlm.nih.gov/pubmed/22221518 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.1186/1556-276X-7-17 |
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