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Effects of process parameters on sheet resistance uniformity of fluorine-doped tin oxide thin films

An alternative indium-free material for transparent conducting oxides of fluorine-doped tin oxide [FTO] thin films deposited on polyethylene terephthalate [PET] was prepared by electron cyclotron resonance - metal organic chemical vapor deposition [ECR-MOCVD]. One of the essential issues regarding m...

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Hlavní autoři: Hudaya, Chairul, Park, Ji Hun, Lee, Joong Kee
Médium: Artigo
Jazyk:Inglês
Vydáno: Springer 2012
Témata:
On-line přístup:https://ncbi.nlm.nih.gov/pmc/articles/PMC3275492/
https://ncbi.nlm.nih.gov/pubmed/22221518
https://ncbi.nlm.nih.govhttp://dx.doi.org/10.1186/1556-276X-7-17
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