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A MEMS-Based Flow Rate and Flow Direction Sensing Platform with Integrated Temperature Compensation Scheme
This study develops a MEMS-based low-cost sensing platform for sensing gas flow rate and flow direction comprising four silicon nitride cantilever beams arranged in a cross-form configuration, a circular hot-wire flow meter suspended on a silicon nitride membrane, and an integrated resistive tempera...
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| Autori principali: | , , , |
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| Natura: | Artigo |
| Lingua: | Inglês |
| Pubblicazione: |
Molecular Diversity Preservation International (MDPI)
2009
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| Soggetti: | |
| Accesso online: | https://ncbi.nlm.nih.gov/pmc/articles/PMC3274140/ https://ncbi.nlm.nih.gov/pubmed/22346708 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.3390/s90705460 |
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