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Micro Water Flow Measurement Using a Temperature-Compensated MEMS Piezoresistive Cantilever
In this study, we propose a microelectromechanical system (MEMS) force sensor for microflow measurements. The sensor is equipped with a flow sensing piezoresistive cantilever and a dummy piezoresistive cantilever, which acts as a temperature reference. Since the dummy cantilever is also in the form...
Shranjeno v:
| izdano v: | Micromachines (Basel) |
|---|---|
| Main Authors: | , , , , , , , |
| Format: | Artigo |
| Jezik: | Inglês |
| Izdano: |
MDPI
2020
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| Teme: | |
| Online dostop: | https://ncbi.nlm.nih.gov/pmc/articles/PMC7408251/ https://ncbi.nlm.nih.gov/pubmed/32629841 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.3390/mi11070647 |
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