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MEMS-Based Pulse Wave Sensor Utilizing a Piezoresistive Cantilever
This paper reports on a microelectromechanical systems (MEMS)-based sensor for pulse wave measurement. The sensor consists of an air chamber with a thin membrane and a 300-nm thick piezoresistive cantilever placed inside the chamber. When the membrane of the chamber is in contact with the skin above...
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| Publicado no: | Sensors (Basel) |
|---|---|
| Main Authors: | , , , , , |
| Formato: | Artigo |
| Idioma: | Inglês |
| Publicado em: |
MDPI
2020
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| Assuntos: | |
| Acesso em linha: | https://ncbi.nlm.nih.gov/pmc/articles/PMC7070847/ https://ncbi.nlm.nih.gov/pubmed/32075243 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.3390/s20041052 |
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