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New Si-based multilayers for solar cell applications
In this article, we have fabricated and studied a new multilayer structure Si-SiO(2)/SiN(x )by reactive magnetron sputtering. The comparison between SiO(2 )and SiN(x )host matrices in the optical properties of the multilayers is detailed. Structural analysis was made on the multilayer structures usi...
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| Hauptverfasser: | , , , |
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| Format: | Artigo |
| Sprache: | Inglês |
| Veröffentlicht: |
Springer
2011
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| Schlagworte: | |
| Online Zugang: | https://ncbi.nlm.nih.gov/pmc/articles/PMC3211207/ https://ncbi.nlm.nih.gov/pubmed/21711661 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.1186/1556-276X-6-156 |
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