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Properties of silicon dioxide layers with embedded metal nanocrystals produced by oxidation of Si:Me mixture

A two-dimensional layers of metal (Me) nanocrystals embedded in SiO(2 )were produced by pulsed laser deposition of uniformly mixed Si:Me film followed by its furnace oxidation and rapid thermal annealing. The kinetics of the film oxidation and the structural properties of the prepared samples were i...

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Detalhes bibliográficos
Main Authors: Novikau, Andrei, Gaiduk, Peter, Maksimova, Ksenia, Zenkevich, Andrei
Formato: Artigo
Idioma:Inglês
Publicado em: Springer 2011
Assuntos:
Acesso em linha:https://ncbi.nlm.nih.gov/pmc/articles/PMC3211198/
https://ncbi.nlm.nih.gov/pubmed/21711632
https://ncbi.nlm.nih.govhttp://dx.doi.org/10.1186/1556-276X-6-148
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