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Thermal activation and saturation of ion beam sculpting
We report a material-dependent critical temperature for ion beam sculpting of nanopores in amorphous materials under keV ion irradiation. At temperatures below the critical temperature, irradiated pores open at a rate that soon saturates with decreasing temperature. At temperatures above the critica...
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| Main Authors: | , , , |
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| Formato: | Artigo |
| Idioma: | Inglês |
| Publicado em: |
American Institute of Physics
2011
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| Assuntos: | |
| Acesso em linha: | https://ncbi.nlm.nih.gov/pmc/articles/PMC3085535/ https://ncbi.nlm.nih.gov/pubmed/21544213 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.1063/1.3569705 |
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