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Thermal activation and saturation of ion beam sculpting

We report a material-dependent critical temperature for ion beam sculpting of nanopores in amorphous materials under keV ion irradiation. At temperatures below the critical temperature, irradiated pores open at a rate that soon saturates with decreasing temperature. At temperatures above the critica...

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Bibliografische gegevens
Hoofdauteurs: Hoogerheide, David P., George, H. Bola, Golovchenko, Jene A., Aziz, Michael J.
Formaat: Artigo
Taal:Inglês
Gepubliceerd in: American Institute of Physics 2011
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Online toegang:https://ncbi.nlm.nih.gov/pmc/articles/PMC3085535/
https://ncbi.nlm.nih.gov/pubmed/21544213
https://ncbi.nlm.nih.govhttp://dx.doi.org/10.1063/1.3569705
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