Nanopore fabrication in amorphous Si: Viscous flow model and comparison to experiment

Nanopores fabricated in free-standing amorphous silicon thin films were observed to close under 3 keV argon ion irradiation. The closing rate, measured in situ, exhibited a memory effect: at the same instantaneous radius, pores that started larger close more slowly. An ion-stimulated viscous flow mo...

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Detaylı Bibliyografya
Asıl Yazarlar: George, H. Bola, Tang, Yuye, Chen, Xi, Li, Jiali, Hutchinson, John W., Golovchenko, Jene A., Aziz, Michael J.
Materyal Türü: Artigo
Dil:Inglês
Baskı/Yayın Bilgisi: American Institute of Physics 2010
Konular:
Nanoscale Science and Design
Online Erişim:https://ncbi.nlm.nih.gov/pmc/articles/PMC2912934/
https://ncbi.nlm.nih.gov/pubmed/20680096
https://ncbi.nlm.nih.govhttp://dx.doi.org/10.1063/1.3452390
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