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Nanopore fabrication in amorphous Si: Viscous flow model and comparison to experiment
Nanopores fabricated in free-standing amorphous silicon thin films were observed to close under 3 keV argon ion irradiation. The closing rate, measured in situ, exhibited a memory effect: at the same instantaneous radius, pores that started larger close more slowly. An ion-stimulated viscous flow mo...
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| 主要な著者: | , , , , , , |
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| フォーマット: | Artigo |
| 言語: | Inglês |
| 出版事項: |
American Institute of Physics
2010
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| 主題: | |
| オンライン･アクセス: | https://ncbi.nlm.nih.gov/pmc/articles/PMC2912934/ https://ncbi.nlm.nih.gov/pubmed/20680096 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.1063/1.3452390 |
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