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ZnO-Based Microcavities Sculpted by Focus Ion Beam Milling

We reported an easy fabrication method to realize ZnO-based microcavities with various cavity shapes by focused ion beam (FIB) milling. The optical characteristics of different shaped microcavities have been systematically carried out and analyzed. Through comprehensive studies of cathodoluminescenc...

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Bibliographische Detailangaben
Veröffentlicht in:Nanoscale Res Lett
Hauptverfasser: Chang, Tsu-Chi, Hong, Kuo-Bin, Lai, Ying-Yu, Chou, Yu-Hsun, Wang, Shing-Chung, Lu, Tien-Chang
Format: Artigo
Sprache:Inglês
Veröffentlicht: Springer US 2016
Schlagworte:
Online Zugang:https://ncbi.nlm.nih.gov/pmc/articles/PMC4929116/
https://ncbi.nlm.nih.gov/pubmed/27364999
https://ncbi.nlm.nih.govhttp://dx.doi.org/10.1186/s11671-016-1526-2
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