Low-Loss Optical Waveguides for the Near Ultra-Violet and Visible Spectral Regions with Al(2)O(3) Thin Films from Atomic Layer Deposition

In this work, we report low-loss single-mode integrated optical waveguides in the near ultra-violet and visible spectral regions with aluminum oxide (Al(2)O(3)) films using an atomic layer deposition (ALD) process. Alumina films were deposited on glass and fused silica substrates by the ALD process...

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Detalhes bibliográficos
Main Authors: Aslan, Mustafa M., Webster, Nathan A., Byard, Courtney L., Pereira, Marcelo B., Hayes, Colin M., Wiederkehr, Rodrigo S., Mendes, Sergio B.
Formato: Artigo
Idioma:Inglês
Publicado em: 2010
Assuntos:
Article
Acesso em linha:https://ncbi.nlm.nih.gov/pmc/articles/PMC3042696/
https://ncbi.nlm.nih.gov/pubmed/21359156
https://ncbi.nlm.nih.govhttp://dx.doi.org/10.1016/j.tsf.2010.03.011
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