Low-Loss Optical Waveguides for the Near Ultra-Violet and Visible Spectral Regions with Al(2)O(3) Thin Films from Atomic Layer Deposition

In this work, we report low-loss single-mode integrated optical waveguides in the near ultra-violet and visible spectral regions with aluminum oxide (Al(2)O(3)) films using an atomic layer deposition (ALD) process. Alumina films were deposited on glass and fused silica substrates by the ALD process...

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Bibliografski detalji
Glavni autori: Aslan, Mustafa M., Webster, Nathan A., Byard, Courtney L., Pereira, Marcelo B., Hayes, Colin M., Wiederkehr, Rodrigo S., Mendes, Sergio B.
Format: Artigo
Jezik:Inglês
Izdano: 2010
Teme:
Article
Online pristup:https://ncbi.nlm.nih.gov/pmc/articles/PMC3042696/
https://ncbi.nlm.nih.gov/pubmed/21359156
https://ncbi.nlm.nih.govhttp://dx.doi.org/10.1016/j.tsf.2010.03.011
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