Low-Loss Optical Waveguides for the Near Ultra-Violet and Visible Spectral Regions with Al(2)O(3) Thin Films from Atomic Layer Deposition

In this work, we report low-loss single-mode integrated optical waveguides in the near ultra-violet and visible spectral regions with aluminum oxide (Al(2)O(3)) films using an atomic layer deposition (ALD) process. Alumina films were deposited on glass and fused silica substrates by the ALD process...

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Hlavní autoři: Aslan, Mustafa M., Webster, Nathan A., Byard, Courtney L., Pereira, Marcelo B., Hayes, Colin M., Wiederkehr, Rodrigo S., Mendes, Sergio B.
Médium: Artigo
Jazyk:Inglês
Vydáno: 2010
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Article
On-line přístup:https://ncbi.nlm.nih.gov/pmc/articles/PMC3042696/
https://ncbi.nlm.nih.gov/pubmed/21359156
https://ncbi.nlm.nih.govhttp://dx.doi.org/10.1016/j.tsf.2010.03.011
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