Micro-Machined High-Frequency (80 MHz) PZT Thick Film Linear Arrays

This paper presents the development of a micro-machined high-frequency linear array using PZT piezoelectric thick films. The linear array has 32 elements with an element width of 24 μm and an element length of 4 mm. Array elements were fabricated by deep reactive ion etching of PZT thick films, whic...

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Bibliografiske detaljer
Main Authors: Zhou, Qifa, Wu, Dawei, Liu, Changgeng, Zhu, Benpeng, Djuth, Frank, Shung, K. Kirk
Format: Artigo
Sprog:Inglês
Udgivet: 2010
Fag:
Article
Online adgang:https://ncbi.nlm.nih.gov/pmc/articles/PMC2966894/
https://ncbi.nlm.nih.gov/pubmed/20889407
https://ncbi.nlm.nih.govhttp://dx.doi.org/10.1109/TUFFC.2010.1680
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