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Micro-Machined High-Frequency (80 MHz) PZT Thick Film Linear Arrays
This paper presents the development of a micro-machined high-frequency linear array using PZT piezoelectric thick films. The linear array has 32 elements with an element width of 24 μm and an element length of 4 mm. Array elements were fabricated by deep reactive ion etching of PZT thick films, whic...
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| Main Authors: | , , , , , |
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| Formato: | Artigo |
| Idioma: | Inglês |
| Publicado em: |
2010
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| Assuntos: | |
| Acesso em linha: | https://ncbi.nlm.nih.gov/pmc/articles/PMC2966894/ https://ncbi.nlm.nih.gov/pubmed/20889407 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.1109/TUFFC.2010.1680 |
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