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Micromachining Techniques in Developing High-Frequency Piezoelectric Composite Ultrasonic Array Transducers
Several micromachining techniques for the fabrication of high-frequency piezoelectric composite ultrasonic array transducers are described in this paper. A variety of different techniques are used in patterning the active piezoelectric material, attaching backing material to the transducer, and asse...
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| Main Authors: | , , , |
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| 格式: | Artigo |
| 語言: | Inglês |
| 出版: |
2013
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| 主題: | |
| 在線閱讀: | https://ncbi.nlm.nih.gov/pmc/articles/PMC4077999/ https://ncbi.nlm.nih.gov/pubmed/24297027 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.1109/TUFFC.2013.2860 |
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