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PMN-PT single crystal thick films on silicon substrate for high-frequency micromachined ultrasonic transducers
In this work, a novel high-frequency ultrasonic transducer structure is realized by using PMNPT-on-silicon technology and silicon micromachining. To prepare the single crystalline PMNPT-on-silicon wafers, a hybrid processing method involving wafer bonding, mechanical lapping and wet chemical thinnin...
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| Main Authors: | , , , , , , , , |
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| Formato: | Artigo |
| Idioma: | Inglês |
| Publicado em: |
2008
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| Assuntos: | |
| Acesso em linha: | https://ncbi.nlm.nih.gov/pmc/articles/PMC2954502/ https://ncbi.nlm.nih.gov/pubmed/20953269 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.1109/ULTSYM.2008.0039 |
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