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Lift-off PMN-PT Thick Film for High Frequency Ultrasonic Biomicroscopy

Piezoelectric 0.65Pb(Mg(1/3)Nb(2/3))O(3)-0.35PbTiO(3) (PMN-35PT) thick film with a thickness of approximately 12 µm has been deposited on the platinum buffered Si substrate via a sol-gel composite method. The separation of the film from the substrate was achieved using a wet chemical method. The lif...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: Zhu, Benpeng, Han, Jiangxue, Shi, Jing, Shung, K. Krik, Wei, Q., Huang, YuHong, Kosec, M., Zhou, Qifa
Format: Artigo
Sprache:Inglês
Veröffentlicht: 2010
Schlagworte:
Online Zugang:https://ncbi.nlm.nih.gov/pmc/articles/PMC3002224/
https://ncbi.nlm.nih.gov/pubmed/21170158
https://ncbi.nlm.nih.govhttp://dx.doi.org/10.1111/j.1551-2916.2010.03873.x
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