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Lift-off PMN-PT Thick Film for High Frequency Ultrasonic Biomicroscopy
Piezoelectric 0.65Pb(Mg(1/3)Nb(2/3))O(3)-0.35PbTiO(3) (PMN-35PT) thick film with a thickness of approximately 12 µm has been deposited on the platinum buffered Si substrate via a sol-gel composite method. The separation of the film from the substrate was achieved using a wet chemical method. The lif...
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| Auteurs principaux: | , , , , , , , |
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| Format: | Artigo |
| Langue: | Inglês |
| Publié: |
2010
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| Sujets: | |
| Accès en ligne: | https://ncbi.nlm.nih.gov/pmc/articles/PMC3002224/ https://ncbi.nlm.nih.gov/pubmed/21170158 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.1111/j.1551-2916.2010.03873.x |
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