PMN-PT single crystal thick films on silicon substrate for high-frequency micromachined ultrasonic transducers

In this work, a novel high-frequency ultrasonic transducer structure is realized by using PMNPT-on-silicon technology and silicon micromachining. To prepare the single crystalline PMNPT-on-silicon wafers, a hybrid processing method involving wafer bonding, mechanical lapping and wet chemical thinnin...

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Detaylı Bibliyografya
Asıl Yazarlar: Peng, J., Lau, S.T., Chao, C., Dai, J.Y., Chan, H.L.W., Luo, H.S., Zhu, B.P., Zhou, Q.F., Shung, K.K.
Materyal Türü: Artigo
Dil:Inglês
Baskı/Yayın Bilgisi: 2008
Konular:
Article
Online Erişim:https://ncbi.nlm.nih.gov/pmc/articles/PMC2954502/
https://ncbi.nlm.nih.gov/pubmed/20953269
https://ncbi.nlm.nih.govhttp://dx.doi.org/10.1109/ULTSYM.2008.0039
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