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Evaluation of GeO desorption behavior in the metal∕GeO(2)∕Ge structure and its improvement of the electrical characteristics
The relation between germanium monoxide (GeO) desorption and either improvement or deterioration in electrical characteristics of metal∕GeO(2)∕Ge capacitors fabricated by thermal oxidation has been investigated. In the metal∕GeO(2)∕Ge stack, two processes of GeO desorption at different sites and at...
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| Glavni autori: | , , , |
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| Format: | Artigo |
| Jezik: | Inglês |
| Izdano: |
American Institute of Physics
2010
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| Teme: | |
| Online pristup: | https://ncbi.nlm.nih.gov/pmc/articles/PMC2905455/ https://ncbi.nlm.nih.gov/pubmed/20644659 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.1063/1.3452367 |
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