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Evaluation of GeO desorption behavior in the metal∕GeO(2)∕Ge structure and its improvement of the electrical characteristics

The relation between germanium monoxide (GeO) desorption and either improvement or deterioration in electrical characteristics of metal∕GeO(2)∕Ge capacitors fabricated by thermal oxidation has been investigated. In the metal∕GeO(2)∕Ge stack, two processes of GeO desorption at different sites and at...

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Bibliographic Details
Main Authors: Oniki, Yusuke, Koumo, Hideo, Iwazaki, Yoshitaka, Ueno, Tomo
Format: Artigo
Language:Inglês
Published: American Institute of Physics 2010
Subjects:
Online Access:https://ncbi.nlm.nih.gov/pmc/articles/PMC2905455/
https://ncbi.nlm.nih.gov/pubmed/20644659
https://ncbi.nlm.nih.govhttp://dx.doi.org/10.1063/1.3452367
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