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Alloying and Strain Relaxation in SiGe Islands Grown on Pit-Patterned Si(001) Substrates Probed by Nanotomography

The three-dimensional composition profiles of individual SiGe/Si(001) islands grown on planar and pit-patterned substrates are determined by atomic force microscopy (AFM)-based nanotomography. The observed differences in lateral and vertical composition gradients are correlated with the island morph...

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Bibliografski detalji
Glavni autori: Pezzoli, F, Merdzhanova, T, Rastelli, A, Schmidt, OG
Format: Artigo
Jezik:Inglês
Izdano: Springer 2009
Teme:
Online pristup:https://ncbi.nlm.nih.gov/pmc/articles/PMC2894314/
https://ncbi.nlm.nih.gov/pubmed/20596332
https://ncbi.nlm.nih.govhttp://dx.doi.org/10.1007/s11671-009-9360-4
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