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Thermally Induced Nano-Structural and Optical Changes of nc-Si:H Deposited by Hot-Wire CVD
We report on the thermally induced changes of the nano-structural and optical properties of hydrogenated nanocrystalline silicon in the temperature range 200–700 °C. The as-deposited sample has a high crystalline volume fraction of 53% with an average crystallite size of ~3.9 nm, where 66% of the to...
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| Main Authors: | , , , , , , , |
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| Formato: | Artigo |
| Idioma: | Inglês |
| Publicado em: |
Springer
2009
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| Assuntos: | |
| Acesso em linha: | https://ncbi.nlm.nih.gov/pmc/articles/PMC2893958/ https://ncbi.nlm.nih.gov/pubmed/20596406 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.1007/s11671-008-9243-0 |
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