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Gray-scale photolithography using microfluidic photomasks

The ability to produce three-dimensional (3D) microstructures is of increasing importance in the miniaturization of mechanical or fluidic devices, optical elements, self-assembling components, and tissue-engineering scaffolds, among others. Traditional photolithography, the most widely used process...

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Detalhes bibliográficos
Main Authors: Chen, Chihchen, Hirdes, Danny, Folch, Albert
Formato: Artigo
Idioma:Inglês
Publicado em: The National Academy of Sciences 2003
Assuntos:
Acesso em linha:https://ncbi.nlm.nih.gov/pmc/articles/PMC149860/
https://ncbi.nlm.nih.gov/pubmed/12574512
https://ncbi.nlm.nih.govhttp://dx.doi.org/10.1073/pnas.0435755100
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