A Ceramic Diffusion Bonding Method for Passive LC High-Temperature Pressure Sensor

Alumina ceramic is a highly promising material for fabricating high-temperature pressure sensors. In this paper, a direct bonding method for fabricating a sensitive cavity with alumina ceramic is presented. Alumina ceramic substrates were bonded together to form a sensitive cavity for high-temperatu...

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Bibliographic Details
Main Authors: Chen Li, Boshan Sun, Yanan Xue, Jijun Xiong
Format: Artigo
Language:Inglês
Published: MDPI AG 2018-08-01
Series:Sensors
Subjects:
alumina ceramic
diffusion bonding
sensitive cavity
pressure sensor
high-temperature application
Online Access:http://www.mdpi.com/1424-8220/18/8/2676
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