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A Ceramic Diffusion Bonding Method for Passive LC High-Temperature Pressure Sensor
Alumina ceramic is a highly promising material for fabricating high-temperature pressure sensors. In this paper, a direct bonding method for fabricating a sensitive cavity with alumina ceramic is presented. Alumina ceramic substrates were bonded together to form a sensitive cavity for high-temperatu...
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| Publicado en: | Sensors (Basel) |
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| Main Authors: | , , , |
| Formato: | Artigo |
| Idioma: | Inglês |
| Publicado: |
MDPI
2018
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| Assuntos: | |
| Acceso en liña: | https://ncbi.nlm.nih.gov/pmc/articles/PMC6111589/ https://ncbi.nlm.nih.gov/pubmed/30110982 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.3390/s18082676 |
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