A Fourier Transform Spectrometer Based on an Electrothermal MEMS Mirror with Improved Linear Scan Range
A Fourier transform spectrometer (FTS) that incorporates a closed-loop controlled, electrothermally actuated microelectromechanical systems (MEMS) micromirror is proposed and experimentally verified. The scan range and the tilting angle of the mirror plate are the two critical parameters for MEMS-ba...
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| Principais autores: | , , , |
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| Formato: | Artigo |
| Idioma: | Inglês |
| Publicado: |
MDPI AG
2016-09-01
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| Series: | Sensors |
| Assuntos: | |
| Acceso en liña: | http://www.mdpi.com/1424-8220/16/10/1611 |
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