A Fourier Transform Spectrometer Based on an Electrothermal MEMS Mirror with Improved Linear Scan Range

A Fourier transform spectrometer (FTS) that incorporates a closed-loop controlled, electrothermally actuated microelectromechanical systems (MEMS) micromirror is proposed and experimentally verified. The scan range and the tilting angle of the mirror plate are the two critical parameters for MEMS-ba...

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Detalhes bibliográficos

Principais autores:	Wei Wang, Jiapin Chen, Aleksandar. S. Zivkovic, Huikai Xie
Formato:	Artigo
Idioma:	Inglês
Publicado em:	MDPI AG 2016-09-01
coleção:	Sensors
Assuntos:	Fourier transform spectrometer microelectromechanical systems (MEMS) electrothermal micromirror closed-loop control
Acesso em linha:	http://www.mdpi.com/1424-8220/16/10/1611
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