Review of Electrothermal Micromirrors
Electrothermal micromirrors have become an important type of micromirrors due to their large angular scanning range and large linear motion. Typically, electrothermal micromirrors do not have a torsional bar, so they can easily generate linear motion. In this paper, electrothermal micromirrors based...
Gorde:
| Egile Nagusiak: | , , , , |
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| Formatua: | Artigo |
| Hizkuntza: | Inglês |
| Argitaratua: |
MDPI AG
2022-03-01
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| Saila: | Micromachines |
| Gaiak: | |
| Sarrera elektronikoa: | https://www.mdpi.com/2072-666X/13/3/429 |
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