Micromachined Silicon Platform for Precise Assembly of 2D Multilayer Laue Lenses for High-Resolution X-ray Microscopy

We report on a developed micromachined silicon platform for the precise assembly of 2D multilayer Laue lenses (MLLs) for high-resolution X-ray microscopy. The platform is 10 × 10 mm² and is fabricated on ~500 µm thick silicon wafers through multiple steps of photolithography and deep reac...

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Hlavní autoři:	Wei Xu, Weihe Xu, Nathalie Bouet, Juan Zhou, Hanfei Yan, Xiaojing Huang, Ming Lu, Maxim Zalalutdinov, Yong S. Chu, Evgeny Nazaretski
Médium:	Artigo
Jazyk:	Inglês
Vydáno:	MDPI AG 2020-10-01
Edice:	Micromachines
Témata:	MEMS microfabrication multilayer Laue lenses X-ray microscopy
On-line přístup:	https://www.mdpi.com/2072-666X/11/10/939
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