Micromachined Silicon Platform for Precise Assembly of 2D Multilayer Laue Lenses for High-Resolution X-ray Microscopy
We report on a developed micromachined silicon platform for the precise assembly of 2D multilayer Laue lenses (MLLs) for high-resolution X-ray microscopy. The platform is 10 × 10 mm<sup>2</sup> and is fabricated on ~500 µm thick silicon wafers through multiple steps of photolithography and deep reac...
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| Principais autores: | , , , , , , , , , |
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| Format: | Artigo |
| Sprog: | Inglês |
| Udgivet: |
MDPI AG
2020-10-01
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| Serier: | Micromachines |
| Fag: | |
| Online adgang: | https://www.mdpi.com/2072-666X/11/10/939 |
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