Review of MEMS Test Structures for Mechanical Parameter Extraction

This paper reviews the recent progress in MEMS test structures for mechanical parameter extraction. MEMS test structures reviewed include cantilevers, fixed-fixed beams, bent-beam, guckel rings, pointers, circular diaphragm, and lancet structures. Important mechanical and process parameters are high...

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Bibliografski detalji

Glavni autori:	A. Sharma, M. Kaur, D. Bansal, D. Kumar, K. Rangra
Format:	Artigo
Jezik:	Inglês
Izdano:	Sumy State University 2011-01-01
Serija:	Журнал нано- та електронної фізики
Teme:	MEMS Test Structures Residual Stress Stress Gradient Young’s Modulus Poisson Ratio Pull- In Voltage
Online pristup:	http://jnep.sumdu.edu.ua/download/numbers/2011/1,%20Part%202/articles/jnep_2011_V3_N1(Part2)_243-253.pdf
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